J-GLOBAL ID:200904081890895777  Research Project code:9800025686 Update date:Mar. 23, 1995

Study on measurement, evaluation and control of elementary functions in microregion of substances and materials (5) Study on soft X-ray radiation applied measurement for microregion

物質・材料の極微小領域における素機能の計測・評価・制御に関する研究(第II期) 6.素機能の計測・制御法の高度化に関する研究 �微小領域軟X線の計測応用に関する研究
Study period:1992 - 1993
Keywords (8):
functional ,  function(performance) ,  control ,  functional ,  function ,  material ,  radiation ,  soft
Research program: SCF Comprehensive Joint Research (General Research)
Ministry with control over the research :
Ministry of Education, Culture, Sports, Science and Technology
Research budget: 1993: \9,650,000

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