J-GLOBAL ID:200904082406870460  Research Project code:9800041382 Update date:Mar. 17, 2006

Study on fundamental technique of the beam process

Study period:1995 - 2000
Organization (1):
Investigating Researcher (1):
Research overview:
Establishment of fundamental for reaction progression and device technology relating to the reaction process due to excitation with electron, ion or photon beams.
Keywords (7):
electron ,  etching ,  ion ,  Monte ,  resist ,  inorganic ,  energy
Research program: Ordinary Research
Ministry with control over the research :
Ministry of Economy, Trade and Industry
Organization with control over the research:
National Institute of Advanced Industrial Science and Technology
Research budget: 1997: \2,820,000

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