J-GLOBAL ID:200904082740970424  Research Project code:9800034456 Update date:Dec. 01, 2000

Research on development of microsensor

Study period:1995 - 1997
Organization (1):
Investigating Researcher (2):
Research overview:
In order to realize more compact, higher density and higher function, we will establish micro fabrication of a exposure, etching, thin film deposition and so on technology, and is an object to develop micro sensor.
Keywords (8):
Sensor ,  small type ,  exposure(photography) ,  etching ,  thin film ,  fine patterning ,  circuit pattern generation ,  electron beam
Research program: Ordinary Research
Research budget: 1997: \8,250,000

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