Proj
J-GLOBAL ID:200904085177650620  Research Project code:9800028845 Update date:Mar. 30, 2001

Development of fabricating oxide thin film

酸化物薄膜の作製技術開発
Study period:1994 - 1996
Organization (1):
Investigating Researcher (2):
Research overview:
Metals such as Pb, Zr, and Ti or their oxides are evaporated by an electron beam and thin films are fabricated. Problems of fabricating thin films are studied.
Keywords (8):
thin film ,  oxide ,  dielectric ,  lead ,  zirconium ,  titanium ,  thin film growth ,  electron beam evaporation
Research program: Ordinary Research
Research budget: 1995: \200,000

Return to Previous Page