J-GLOBAL ID:200904085363285010  Research Project code:9800044833 Update date:Feb. 27, 2003

Effect of production method on TiN film defects

Study period:1997 - 1998
Organization (1):
Investigating Researcher (2):
Research overview:
TiN film is not use for corrosion resistance material, because the defects, e.g pinhole, crack, exist in film. Decrease of TiN film defects are studied by improvement of production method.
Keywords (4):
nitride ,  titanium ,  ceramic ,  surface
Research program: Ordinary Research
Research budget: 1998: \600,000

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