Proj
J-GLOBAL ID:200904085671945055  Research Project code:9800033728 Update date:Jul. 29, 2010

Study on depth analysis of solids using the secondary ion mass spectrometry

二次イオン質量分析法による固体の深さ方向解析
Study period:1995 - 2003
Organization (1):
Investigating Researcher (2):
Research field (1): Others
Research overview:
The process of secondary ions occurrence from a variety of solids is studies experimentally, and the quantification of depth profiling of surface layers on solids are also investigated.
Keywords (4):
depth ,  secondary ,  quantitative ,  solid(matter)
Research program: Ordinary Research

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