Proj
J-GLOBAL ID:200904088646144748  Research Project code:9800023861 Update date:Mar. 16, 2006

Study on a nanometric drawing technology

ナノメータ描画技術の研究
Study period:1993 - 1993
Organization (1):
Investigating Researcher (1):
Keywords (4):
nanometer ,  electron ,  plotter ,  thin
Research program: Ordinary Research
Ministry with control over the research :
Ministry of Economy, Trade and Industry
Research budget: 1993: \6,000,000

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