Proj
J-GLOBAL ID:200904090763377111  Research Project code:0350012736 Update date:Jan. 26, 2005

Applied research on optical device technology: Evaluation method of interpolation controlled nano-stage

光デバイス技術に関する応用研究-補間制御されたナノステージの評価方法-
Study period:2003 - 2005
Organization (1):
Investigating Researcher (4):
Research overview:
For controlling stage motion of nanometer precision, it is important to obtain more precise stage positional information. Regarding the nanometer precision positioning technique, studies are conducted on how to measure stage motion with a measurement system (prototype) using laser interference comparator, etc. and on how to obtain real time data from linear encoder that measures distance of each axle's motion on the stage and to reproduce the data as computer image.
Project Organization (1):
  • (E247000000)

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