Proj
J-GLOBAL ID:200904091331437187  Research Project code:9800031898 Update date:Feb. 02, 2006

Application of semiconductor thin films to sensors

ダイヤモンド薄膜等半導体薄膜の高機能センサへの応用
Study period:1995 - 1997
Organization (1):
Investigating Researcher (1):
Research overview:
Diamond and silicon carbide thin films are prepared by micro wave chemical vapor deposition and their characteristics are studied for the purpose to develop new thermal, humidity and gas sensors. Trial products of sensors consisted of diamond and/or silicon carbide thin films are fabricated and their properties are researched. Multilayer structured sensors are also studied.
Keywords (7):
semiconductor ,  diamond ,  silicon ,  plasma ,  sensor ,  laminated ,  microwave
Research program: Ordinary Research
Research budget: 1997: \100,000

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