Research Project code：9800031898
Update date：Feb. 02, 2006
Application of semiconductor thin films to sensors
1995 - 1997
Investigating Researcher (1)：
Diamond and silicon carbide thin films are prepared by micro wave chemical vapor deposition and their characteristics are studied for the purpose to develop new thermal, humidity and gas sensors. Trial products of sensors consisted of diamond and/or silicon carbide thin films are fabricated and their properties are researched. Multilayer structured sensors are also studied.
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