J-GLOBAL ID:200904092580556729  Research Project code:9800024767 Update date:Nov. 21, 1995

Study on the development of the evolution,measurement and application technology for extreme high vacuum (1)Study on the highly advanced technology for extreme high vacuum pump

極高真空の発生・計測・利用技術の開発に関する研究 3.極高真空の発生技術の高度化に関する研究 (1)極高真空用ポンプの高度化に関する研究
Study period:1991 - 1992
Keywords (6):
extreme ,  generation ,  vacuum ,  gas ,  reduction ,  vacuum
Research program: SCF Encouragement of Basic Research
Research budget: 1992: \20,483,000

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