Proj
J-GLOBAL ID:200904093751842667  Research Project code:9911004696 Update date:Dec. 15, 2003

Development of technology for fabricating high quality thin films of optical functional materials

光機能材料の高品質薄膜化技術の開発
Study period:1999 - 2000
Organization (1):
Investigating Researcher (6):
Research overview:
Development of technology for fabricating high quality thin films of optical functional materials: For high functional optical devices, we intend to conduct development and evaluation of high quality thin films (LiNbO3, AIN and others) through the use of ion・plasma and exciting line and to examine applying the film to optical functional devices. We would also examine applying organic polysiloxane compounds to the resist for electron beam.
Keywords (2):
optical functional material ,  thin film fabrication
Research program: -

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