Proj
J-GLOBAL ID:200904098806322279  Research Project code:0350011683 Update date:Jun. 27, 2008

Basic study of fine work stage

微細作業ステージの基礎研究
Study period:2002 - 2003
Organization (1):
Investigating Researcher (2):
Research field (3): Machine mechanics/control ,  Intelligent mechanics/mechanical system ,  Control engineering
Research overview:
In such broad fields as biology, medication, new materials, electronics and the like, micro/nano-technology has been expected to create large industries. In the present study, we conduct evaluation with fine working experiment by developing a fine work stage with resolution of submicron for the purpose of higher efficiency and accuracy of working under a microscope.
Keywords (3):
fine work ,  stage ,  parallel mechanism
Research program: -

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