Term

J-GLOBAL ID：200906005708736137

ion beam deposition

物質の構造
Synonyms (9)：

ion beam deposition (イオンビーム蒸着法)
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ion beam evaporation (イオンビーム蒸着法)
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IBAD (イオンビーム支援蒸着)
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ion beam assisted deposition (イオンビーム支援蒸着)
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IBAD
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Broader terms (1)：

physical vapor deposition (物理蒸着)
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Narrower terms (2)：

cluster ion beam deposition (クラスタイオンビーム蒸着)
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ionised cluster beam deposition method (イオン化クラスタビーム蒸着法)
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