HfSiON

電気工学
Synonyms (1)：

hafnium silicate film (ハフニウムシリケート膜)
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Related terms (2)：

hafnium compound (ハフニウム化合物)
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interlayer dielectric (層間絶縁)
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Broader terms (1)：

insulating film (絶縁膜)
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