HVPE(epitaxy)

物質の構造
Synonyms (4)：

HVPE
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hydride vapor-phase epitaxy (水素化物気相エピタクシー)
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hydride vapor phase epitaxy (水素化物気相エピタクシー)
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hydride vapor phase epitaxy (ヒドリド気相エピタキシー)
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Related terms (1)：

vapor phase growth (気相成長)
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Broader terms (1)：

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