Term

J-GLOBAL ID：200906029177595629

circuit pattern generation

電子素子
Related terms (22)：

Diffusion (拡散)
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vacuum deposition (真空蒸着)
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electron beam machining (電子ビーム加工)
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photoresist (フォトレジスト)
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mask (マスク)
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Broader terms (1)：

micro circuit technique (超小形回路技術)
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Narrower terms (2)：

double patterning (ダブルパターニング)
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fine-pitch technology (微細ピッチ技術)
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- Detailed information

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