EUV light source

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Synonyms (6)：

extreme ultra-violet light source (真空紫外線光源)
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EUV light source (極端紫外線光源)
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extreme ultra-violet light source (極端紫外線光源)
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extreme ultra-violet light source (極端紫外光源)
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extreme ultraviolet light source (極端紫外光源)
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Related terms (2)：

vacuum ultraviolet radiation (真空紫外線)
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extreme ultraviolet ray (極端紫外線)
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Broader terms (1)：

light source (光源)
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