Term

J-GLOBAL ID：200906096291824335

line width roughness

電子素子
Synonyms (2)：

line width roughness (ライン幅粗さ)
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line width roughness (ライン幅ラフネス)
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Related terms (6)：

pattern formation (パターン形成)
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- Search "pattern formation"
- Detailed information
lithography (リソグラフィー)
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- Search "lithography"
- Detailed information
recording head (記録ヘッド)
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- Search "recording head"
- Detailed information
recording density (記録密度)
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- Search "recording density"
- Detailed information
line (線)
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- Search "line"
- Detailed information

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Broader terms (1)：

surface roughness (表面粗さ)
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- Search "surface roughness"
- Detailed information

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