Mat
J-GLOBAL ID：200909002529959427
JST material number (FULL)：K19890140C
JST material number：K19890140
Proceedings of the 1st International Symposium on Advanced Materials for ULSI, 1988
JST material number：
JST material number
Identifier of Material (journals)
K19890140
Series title (1)：
- Proceedings. Electrochemical Society 88-19
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Editor/ Editing house (3)：
Electrochemical Society. Electronics Div.
, Electrochemical Society. Dielectrics and Insulation Div.
, Electrochemical Society. High Temperature Materials Div.
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- International Symposium on Advanced Materials for ULSI, 1st, Atlanta, Ga., 19880515 - 19880519
JST library information (0)：
Subject to change. Contact us for the latest status.
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