J-GLOBAL ID:200909002529959427   JST material number (FULL):K19890140C   JST material number:K19890140

Proceedings of the 1st International Symposium on Advanced Materials for ULSI, 1988

JST material number:
JST material number
Identifier of Material (journals)
Series title  (1):
  • Proceedings. Electrochemical Society 88-19
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (3): Electrochemical Society. Electronics Div. ,  Electrochemical Society. Dielectrics and Insulation Div. ,  Electrochemical Society. High Temperature Materials Div.
Publisher: Electrochemical Society
Publication place:Pennington, N.J.
Conference name  (1):
  • International Symposium on Advanced Materials for ULSI, 1st, Atlanta, Ga., 19880515 - 19880519
JST library information (0)

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