Mat
J-GLOBAL ID:200909002529959427
JST material number (FULL):K19890140C
JST material number:K19890140
Proceedings of the 1st International Symposium on Advanced Materials for ULSI, 1988
JST material number:
JST material number
Identifier of Material (journals)
K19890140
Series title (1):
- Proceedings. Electrochemical Society 88-19
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1):
English(EN)
Editor/ Editing house (3):
Electrochemical Society. Electronics Div.
, Electrochemical Society. Dielectrics and Insulation Div.
, Electrochemical Society. High Temperature Materials Div.
Publisher:
Electrochemical Society
Publication place:Pennington, N.J.
Conference name (1):
- International Symposium on Advanced Materials for ULSI, 1st, Atlanta, Ga., 19880515 - 19880519
JST library information (0):
Subject to change. Contact us for the latest status.
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