J-GLOBAL ID:200909004549546539   JST material number (FULL):K19930532Y   JST material number:K19930532

Proceedings of the 9th Symposium on Plasma Processing, 1992

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 1-56677-020-3
Series title  (1):
  • Proceedings. Electrochemical Society 92-18
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Electrochemical Society
Publication place:Pennington, N.J.
Conference name  (1):
  • Symposium on Plasma Processing, 9th, St. Louis, Mo., 19920517 - 19920522
JST library information (0)

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