J-GLOBAL ID:200909006429682113   JST material number (FULL):K19970586N   JST material number:K19970586

Digest of Papers. Microprocesses and Nanotechnology 1997

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 4-930813-77-8
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:Japan(JPN)
Language (1): English(EN)
Publisher: 応用物理学会
Publication place:東京
Conference name  (1):
  • International Microprocesses and Nanotechnology Conference, 10th, Nagoya, 19970707 - 19970710
JST library information (0)

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