Mat
J-GLOBAL ID：200909012632666107
JST material number (FULL)：K19930660A
JST material number：K19930660
Surface Chemical Cleaning and Passivation for Semiconductor Processing
JST material number：
JST material number
Identifier of Material (journals)
K19930660
ISBN (1)：
1-55899-213-8
Series title (1)：
- Materials Research Society Symposia Proceedings 315
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Materials Research Society
Publication place：Pittsburgh, Pa.
Conference name (2)：
- Symposium on Surface Chemical Cleaning and Passivation for Semiconductor Processing, 2nd, San Francisco, Calif., 19930413 - 19930415
- Materials Research Society Spring Meeting Symposium Y
JST library information (0)：
Subject to change. Contact us for the latest status.
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