J-GLOBAL ID:200909017398357431   JST material number (FULL):K19940572F   JST material number:K19940572

Metal-Organic Chemical Vapor Deposition of Electronic Ceramics

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 1-55899-234-0
Series title  (1):
  • Materials Research Society Symposia Proceedings 335
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (2):
  • Electronic Ceramics Symposium on Metal-Organic Chemical Vapor Deposition, Boston, Mass., 19931129 - 19931203
  • Materials Research Society. Fall Meeting Symposium Y
JST library information (0)

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