J-GLOBAL ID:200909020409757926   JST material number (FULL):N19970386I   JST material number:N19970386

窒化タンタル陽極酸化膜による耐熱性に優れた薄膜コンデンサの作製 平成7年度 No.06555087

JST material number:
JST material number
Identifier of Material (journals)
Material type:Article, Print, zz
Publication frequency: zz
Country of issued:Japan(JPN)
Language (1): Japanese(JA)
Publisher: 文部省
Publication place:東京
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