Mat
J-GLOBAL ID：200909024718605400
JST material number (FULL)：K19990467Z
JST material number：K19990467
Proceedings of the 2nd International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing
JST material number：
JST material number
Identifier of Material (journals)
K19990467
ISBN (1)：
1-56677-201-X
Series title (1)：
- Proceedings. Electrochemical Society 98-7
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Editor/ Editing house (1)：
Electrochemical Society. Electronics and Dielectric Science and Technology Div.
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing, 2nd, San Diego, Calif., 19980505 - 19980507
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
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