J-GLOBAL ID:200909029226286107   JST material number (FULL):N19942482G   JST material number:N19942482

水素終端シリコン表面の初期酸化と極薄金属膜/極薄シリコン酸化膜界面構造の解明 平成4-5年度 No.04452096

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JST material number
Identifier of Material (journals)
Material type:Article, Print, zz
Publication frequency: zz
Country of issued:Japan(JPN)
Language (2): Japanese(JA) ,  English(EN)
Publisher: 文部省
Publication place:東京
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