Mat
J-GLOBAL ID：200909032605111595
JST material number (FULL)：K19940184C
JST material number：K19940184
Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing
JST material number：
JST material number
Identifier of Material (journals)
K19940184
ISBN (1)：
1-56677-059-9
Series title (1)：
- Proceedings. Electrochemical Society 93-15
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- Symposium on Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing, Grenoble, 19930917 -
JST library information (0)：
Subject to change. Contact us for the latest status.
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