Mat
J-GLOBAL ID：200909037363207616
JST material number (FULL)：K20030182Y
JST material number：K20030182
Technical Digest of the 16th International Vacuum Microelectronics Conference, 2003
JST material number：
JST material number
Identifier of Material (journals)
K20030182
ISBN (1)：
4-8181-9515-4
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：Japan(JPN)
Language (1)：
English(EN)
JST classification (3)：
電磁気学、光学 (BD)
, 電子物性、磁性、光物性 (BM)
, 電子工学 (NC)
Editor/ Editing house (4)：
Commemorative Association for the Japan World Exposition
, American Vacuum Society
, Institute of Electrical and Electronics Engineers. Electron Device Society
, National Institute of Advanced Industrial Science and Technology
Publisher：
158th Committee on Vacuum Nanoelectronics, Japan Society for the Promotion of Science
Publication place：*
Conference name (2)：
- International Vacuum Microelectronics Conference, 16th, Osaka, 20030707 - 20030711
- IVMC 2003
JST library information (0)：
Subject to change. Contact us for the latest status.
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