J-GLOBAL ID:200909038467638984   JST material number (FULL):K19860619C   JST material number:K19860619

Impurity Diffusion and Gettering in Silicon

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 0-931837-01-4
Series title  (1):
  • Materials Research Society Symposia Proceedings 36
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (1):
  • Symposium on Impurity Diffusion and Gettering Semiconductors, Boston, Mass., 19841127 - 19841130
JST library information (0)

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