Mat
J-GLOBAL ID:200909038918140900   JST material number (FULL):K19870588A   JST material number:K19870588

Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, 1986

JST material number:
JST material number
Identifier of Material (journals)
K19870588
Series title  (1):
  • Proceedings. Electrochemical Society 87-10
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (1): Electrochemical Society. High Temperature Materials Div.
Publisher: Electrochemical Society
Publication place:Princeton, N.J.
Conference name  (1):
  • Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, 2nd, San Diego, Calif., 19861020 - 19861024
JST library information (0)

※Subject to change. Contact us for the latest status.


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