J-GLOBAL ID:200909040049586530   JST material number (FULL):N20001285T   JST material number:N20001285

量子化イオン照射による半導体ナノ構造の加工と特性制御 平成9-11年度 No.09555102

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JST material number
Identifier of Material (journals)
Material type:Article, Print, zz
Publication frequency: zz
Country of issued:Japan(JPN)
Language (2): Japanese(JA) ,  English(EN)
Publisher: 文部省
Publication place:東京
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