J-GLOBAL ID:200909045369189515   JST material number (FULL):N19991145I   JST material number:N19991145

金属をドープした半導体性DLC膜のナノスケール制御プラズマCVD 平成9年度 No.08455346

JST material number:
JST material number
Identifier of Material (journals)
Material type:Article, Print, zz
Publication frequency: zz
Country of issued:Japan(JPN)
Language (2): Japanese(JA) ,  English(EN)
Publisher: 文部省
Publication place:東京
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