Mat
J-GLOBAL ID:200909045968102436   JST material number (FULL):K19660177X   JST material number:K19660177

Symposium on the Deposition of Thin Films by Sputtering 660609

JST material number:
JST material number
Identifier of Material (journals)
K19660177
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (2): Consolidated Vacuum Corp. ,  Rochester Univ.
Conference name  (1):
  • Symposium on the Deposition of Thin Films by Sputtering, Rochester, N. Y., 19660609 -
JST library information (0)

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