Mat
J-GLOBAL ID：200909050309178658
JST material number (FULL)：C0789BAD
JST material number：C0789B
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
JST material number：
JST material number
Identifier of Material (journals)
C0789B
ISSN (1)：
0734-2101
CODEN (1)：
JVTAD6
Material type：Article, Meta Only, bm
Publication frequency： bm
Country of issued：United States(USA)
Language (1)：
English(EN)
JST classification (1)：
物理学一般・基礎 (BA)
Editor/ Editing house (1)：
American Vacuum Society
Publisher：
American Inst. of Physics
Publication place：New York
Conference name (36)：
- AVS International Symposium & Exhibition, 56th, San Jose, Calif., 20091108 - 20091113
- AVS International Symposium & Exhibition, 55th, Boston, Mass, 20081019 - 20081019
- AVS International Symposium, 55th, Boston, Mass., 20081019 - 20081024
- Canadian Semiconductor Technology Conference, 12th, Ottawa, 20050816 - 20050819
- AVS International Symposium, 52nd, Boston, Mass., 20051030 - 20051104
ｍore...
Previous material name (1)：
- Journal of Vacuum Science & Technology
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
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