Mat
J-GLOBAL ID：200909050368344782
JST material number (FULL)：K19890651Z
JST material number：K19890651
Proceedings of the 4th Symposium on Automated Integrated Circuits Manufacturing, 1988
JST material number：
JST material number
Identifier of Material (journals)
K19890651
Series title (1)：
- Proceedings. Electrochemical Society 89-2
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Editor/ Editing house (2)：
Electrochemical Society. Electronics Div.
, Electrochemical Society. Dielectrics and Insulation Div.
Publisher：
Electrochemical Society
Publication place：Princeton, N.J.
Conference name (1)：
- Symposium on Automated Integrated Circuits Manufacturing, Chicago, Ill., 19881009 - 19881014
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
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