Mat
J-GLOBAL ID：200909051990230987
JST material number (FULL)：K19900788E
JST material number：K19900788
ULSI Science and Technology 1989
JST material number：
JST material number
Identifier of Material (journals)
K19900788
Series title (1)：
- Proceedings. Electrochemical Society 89-9
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Editor/ Editing house (2)：
Electrochemical Society. Electronics Div.
, Electrochemical Society. Dielectrics and Insulation Div.
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- International Symposium on Ultra Large Scale Integration Science and Technology, 2nd, Los Angeles, Calif., 19890507 - 19890512
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
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