J-GLOBAL ID:200909051990230987   JST material number (FULL):K19900788E   JST material number:K19900788

ULSI Science and Technology 1989

JST material number:
JST material number
Identifier of Material (journals)
Series title  (1):
  • Proceedings. Electrochemical Society 89-9
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (2): Electrochemical Society. Electronics Div. ,  Electrochemical Society. Dielectrics and Insulation Div.
Publisher: Electrochemical Society
Publication place:Pennington, N.J.
Conference name  (1):
  • International Symposium on Ultra Large Scale Integration Science and Technology, 2nd, Los Angeles, Calif., 19890507 - 19890512
JST library information (0)

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