J-GLOBAL ID:200909054101930939   JST material number (FULL):K19900009Q   JST material number:K19900009

Technical Digest. APCT '89

JST material number:
JST material number
Identifier of Material (journals)
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:Japan(JPN)
Language (1): English(EN)
Editor/ Editing house (1): American Vacuum Society
Publisher: 応用物理学会
Publication place:東京
Conference name  (1):
  • International Meeting on Advanced Processing and Characterization Technologies, 1st, Tokyo, 19891004 - 19891006
JST library information (0)

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