Mat
J-GLOBAL ID:200909054527973562   JST material number (FULL):K19930424I   JST material number:K19930424

Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing

JST material number:
JST material number
Identifier of Material (journals)
K19930424
ISBN (1): 1-55899-154-9
Series title  (1):
  • Materials Research Society Symposia Proceedings 259
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (1):
  • Symposium on Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing, San Francisco, Calif., 19920427 - 19920429
JST library information (0)

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