Mat
J-GLOBAL ID：200909054527973562
JST material number (FULL)：K19930424I
JST material number：K19930424
Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing
JST material number：
JST material number
Identifier of Material (journals)
K19930424
ISBN (1)：
1-55899-154-9
Series title (1)：
- Materials Research Society Symposia Proceedings 259
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Materials Research Society
Publication place：Pittsburgh, Pa.
Conference name (1)：
- Symposium on Chemical Surface Preparation, Passivation and Cleaning for Semiconductor Growth and Processing, San Francisco, Calif., 19920427 - 19920429
JST library information (0)：
Subject to change. Contact us for the latest status.
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