Mat
J-GLOBAL ID：200909056784946099
JST material number (FULL)：K19940809G
JST material number：K19940809
Proceedings of the 10th Symposium on Plasma Processing, 1994
JST material number：
JST material number
Identifier of Material (journals)
K19940809
ISBN (1)：
1-56677-077-7
Series title (1)：
- Proceedings. Electrochemical Society 94-20
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- Symposium on Plasma Processing, 10th, San Francisco, Calif., 19940522 - 19940527
JST library information (0)：
Subject to change. Contact us for the latest status.
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