J-GLOBAL ID:200909056784946099   JST material number (FULL):K19940809G   JST material number:K19940809

Proceedings of the 10th Symposium on Plasma Processing, 1994

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 1-56677-077-7
Series title  (1):
  • Proceedings. Electrochemical Society 94-20
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Electrochemical Society
Publication place:Pennington, N.J.
Conference name  (1):
  • Symposium on Plasma Processing, 10th, San Francisco, Calif., 19940522 - 19940527
JST library information (0)

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