Mat
J-GLOBAL ID：200909056904935371
JST material number (FULL)：K19910607D
JST material number：K19910607
Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing
JST material number：
JST material number
Identifier of Material (journals)
K19910607
ISBN (1)：
1-55899-019-4
Series title (1)：
- Materials Research Society Symposia Proceedings 146
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Materials Research Society
Publication place：Pittsburgh, Pa.
Conference name (1)：
- Symposium on Rapid Thermal Annealing/Chemical Vapor Deposition and Integrated Processing, San Diego, Calif., 19890425 - 19890428
JST library information (0)：
Subject to change. Contact us for the latest status.
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