J-GLOBAL ID:200909058406243791   JST material number (FULL):N19970388C   JST material number:N19970388

Walking Driveによる同時3軸ナノメータ制御超精密加工機の開発 平成7年度 No.06555039

JST material number:
JST material number
Identifier of Material (journals)
Material type:Article, Print, zz
Publication frequency: zz
Country of issued:Japan(JPN)
Language (1): Japanese(JA)
Publisher: 文部省
Publication place:東京
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