Mat
J-GLOBAL ID：200909060172242391
JST material number (FULL)：K19970050T
JST material number：K19970050
Proceedings of the 4th International Symposium on Process Physics and Modeling in Semiconductor Technology, 1996
JST material number：
JST material number
Identifier of Material (journals)
K19970050
ISBN (1)：
1-56677-154-4
Series title (1)：
- Proceedings. Electrochemical Society 96-4
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- International Symposium on Process Physics and Modeling in Semiconductor Technology, 4th, Los Angeles, Calif., 19960505 - 19960510
JST library information (0)：
Subject to change. Contact us for the latest status.
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