Mat
J-GLOBAL ID：200909061240025198
JST material number (FULL)：K19970661H
JST material number：K19970661
Crystalline Defects and Contamination: Their Impact and Control in Device Manufacturing 2
JST material number：
JST material number
Identifier of Material (journals)
K19970661
ISBN (1)：
1-56677-175-7
Series title (1)：
- Proceedings. Electrochemical Society 97-22
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Publisher：
Electrochemical Society
Publication place：Pennington, N.J.
Conference name (1)：
- Symposium on Crystalline Defects and Contamination: Their Impact and Control in Devices, 2nd, Paris, 19970831 - 19970905
JST library information (0)：
Subject to change. Contact us for the latest status.
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