Mat
J-GLOBAL ID：200909063787491757
JST material number (FULL)：K19890647O
JST material number：K19890647
Proceedings of the Symposium on Process Physics and Modeling in Semiconductor Technology, 1986
JST material number：
JST material number
Identifier of Material (journals)
K19890647
Series title (1)：
- Proceedings. Electrochemical Society 88-16
Material type：Proceedings, Print, zz
Publication frequency： zz
Country of issued：United States(USA)
Language (1)：
English(EN)
Editor/ Editing house (2)：
Electrochemical Society. Electronics Div.
, Electrochemical Society. Dielectrics and Insulation Div.
Publisher：
Electrochemical Society
Publication place：Princeton, N.J.
Conference name (1)：
- Symposium on Process Physics and Modeling in Semiconductor Technology, San Diego, Calif., 19861019 - 19861024
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
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