J-GLOBAL ID:200909065028078341   JST material number (FULL):K19950791L   JST material number:K19950791

ULSI Science and Technology, 1995

JST material number:
JST material number
Identifier of Material (journals)
ISBN (1): 1-56677-099-8
Series title  (1):
  • Proceedings. Electrochemical Society 95-5
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Electrochemical Society
Publication place:Pennington, N.J.
Conference name  (1):
  • International Symposium on Ultra Large Scale Integration Science and Technology, 5th, Reno, Nev., 19950522 - 19950526
JST library information (0)

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