Mat
J-GLOBAL ID：200909065955693134
JST material number (FULL)：T0521AAP
JST material number：T0521A
IEEE Transactions on Semiconductor Manufacturing
JST material number：
JST material number
Identifier of Material (journals)
T0521A
ISSN (1)：
0894-6507
CODEN (1)：
ITSMED
Material type：Article, Meta Only, q
Publication frequency： q
Country of issued：United States(USA)
Language (1)：
English(EN)
JST classification (1)：
電子工学 (NC)
Publisher：
Institute of Electrical and Electronics Engineers
, Institute of Electrical and Electronics Engineers. Components, Packaging, and Manufacturing Technology Society
, Institute of Electrical and Electronics Engineers. Electron Devices Society
, Institute of Electrical and Electronics Engineers. Reliability Society
, Institute of Electrical and Electronics Engineers. Solid-State Circuits Society
Publication place：New York
Conference name (23)：
- Advanced Semiconductor Manufacturing Conference, 22nd, New York, 20110516 - 20110518
- International Conference on Microelectronic Test Structures, 24th, Amsterdam, 20110404 - 20110407
- International Conference on Microelectronic Test Structures, Hiroshima, 20100322 - 20100325
- International Conference on Microelectronic Test Structures, Oxnard, Calif., 20090330 - 20090402
- IEEE/SEMI Advanced Semiconductor Manufacturing Conference, San Francisco, Calif., 20100711 - 20100713
ｍore...
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
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