Mat
J-GLOBAL ID：200909068920732241
JST material number (FULL)：C0406BAJ
JST material number：C0406B
Microelectronic Engineering
JST material number：
JST material number
Identifier of Material (journals)
C0406B
ISSN (1)：
0167-9317
CODEN (1)：
MIENEF
Material type：Article, Meta Only, 18a
Publication frequency： 18a
Country of issued：Netherlands(NLD)
Language (1)：
English(EN)
JST classification (1)：
電子工学 (NC)
Publisher：
Elsevier
Publication place：Amsterdam
Conference name (59)：
- International Workshop on Materials for Advanced Metallization, Grenoble, 20120311 - 20120314
- International Conference of Insulating Films on Semiconductors, 18th, Cracow, 20130625 - 20130628
- Nanoscale Imaging, Fabrication and Materials Modification Using Ion Beams Symposium, Suntec, 20110626 - 20110701
- SEMATECH Surface Preparation and Cleaning Conference, 13th, Austin, Tex., 20110321 - 20110323
- International Conference on Micro and Nano Engineering, Toulouse, 20120916 - 20120920
ｍore...
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
Return to Previous Page
