Mat
J-GLOBAL ID：200909072308403953
JST material number (FULL)：E0974AAE
JST material number：E0974A
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures
JST material number：
JST material number
Identifier of Material (journals)
E0974A
ISSN (1)：
1071-1023
CODEN (1)：
JVTBD9
Material type：Article, Meta and Print, bm
Publication frequency： bm
Country of issued：United States(USA)
Language (1)：
English(EN)
JST classification (3)：
物質の構造、放射線物理 (BK)
, 物理学一般・基礎 (BA)
, 電子工学 (NC)
Editor/ Editing house (1)：
American Vacuum Society
Publisher：
American Inst. of Physics
Publication place：New York
Conference name (39)：
- International Workshop on Insight in Semiconductor device Fabrication, Metrology, and Modeling, Napa, Calif., 20090426 - 20090429
- Workshop on Dielectrics in Microelectronics, 15th, Berlin, 20080623 - 20080625
- North American Conference on Molecular Beam Epitaxy, 24th, Durham, N.C., 20061008 - 20061011
- International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, 43rd, Marco Island, Fla., 19990601 - 19990604
- International Conference on Advanced Materials and Processes for Microelectronics, 1st, San Jose, Calif., 19990315 - 19990318
ｍore...
Previous material name (1)：
- Journal of Vacuum Science & Technology
Successor material name (1)：
- Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
JST library information (0)
※：
※Subject to change. Contact us for the latest status.
Return to Previous Page
