Mat
J-GLOBAL ID:200909072443244008   JST material number (FULL):K19960503R   JST material number:K19960503

Advanced Metallization and Interconnect Systems for ULSI Applications in 1995

JST material number:
JST material number
Identifier of Material (journals)
K19960503
ISBN (1): 1-55899-341-X
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Editor/ Editing house (1): California Univ. Berkeley. Univ. Extension
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (2):
  • Conference on Advanced Metallization and Interconnect Systems for ULSI Applications, Portland, Or., 19951003 - 19951005
  • Conference on Advanced Metallization and Interconnect Systems for ULSI Applications. Parallel Session, Tokyo, 19951024 - 19951025
JST library information (0)

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