Mat
J-GLOBAL ID:200909072667884649   JST material number (FULL):K19890580Q   JST material number:K19890580

Chemical Perspectives of Microelectronic Materials

JST material number:
JST material number
Identifier of Material (journals)
K19890580
ISBN (1): 1-55899-004-6
Series title  (1):
  • Materials Research Society Symposia Proceedings 131
Material type:Proceedings, Print, zz
Publication frequency: zz
Country of issued:United States(USA)
Language (1): English(EN)
Publisher: Materials Research Society
Publication place:Pittsburgh, Pa.
Conference name  (1):
  • Symposium on Chemical Perspectives of Microelectronic Materials, Boston, Mass., 19881130 - 19881202
JST library information (0)

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